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A User's Guide to Vacuum Technology | 
 enlarge | Author: John F. O'hanlon
Publisher: John Wiley & Sons
Category: Book
List Price: $99.50
Buy New: $52.08
You Save: $47.42 (48%)
New (8) Used (14) from $19.80
Rating:  5 reviews
Sales Rank: 894140
Media: Hardcover
Edition: 2
Number Of Items: 1
Pages: 512
Shipping Weight (lbs): 1.9
Dimensions (in): 9.3 x 6.4 x 1.2
ISBN: 0471812420
Dewey Decimal Number: 621.55
EAN: 9780471812425
ASIN: 0471812420
Publication Date: April 24, 1989
Availability: Usually ships in 1-2 business days
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Product Description
This book introduces the reader to the theory and practice of modern vacuum technology, with applications. It focuses on the understanding, operation and selection of equipment for vacuum processes used in semiconductor, optical and related technologies. This second edition has new information on components, lubrication, pump fluids and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system. The book will be of benefit to electrical and mechanical engineers and graduate students. The previous edition of this book was published in 1980.
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| Customer Reviews:
The Last Word in Flow Leak Detection! August 24, 2006
1 out of 2 found this review helpful
A colleague who likes to call himself "Captain Suction" and I were debating the exigencies of a client's flow leak detection problem, and needless to say, things got quite hot. At least they did until I slammed O'Hanlon's volume on his cubicle and yelled, "Look it up, sucker!" I didn't hear a peep from him for weeks.
everyone in semiconductor industrie must read this book September 3, 2005
1 out of 1 found this review helpful
Since I work in a very big semi' fab as field service engineer I looking for a good description of any tool part's on several manufacturing machines. But i work in Germany and it isn't so easy to find much more and better information as for an student without experience. It is my second book about vakuum technologie, all new kinds of engineering and also standard technologie is well prepaired in this issue. Some description of Pump's could be better or more funktionplan's , but all in one book is maybe too much. I was very surprised of this universal Handbook for engineer's and technician, best offer for all who need information about PVD, CVD, Implant vakuum etc. A lot of basic's in introduction part, well to understand, intresting gas properties, cluster technologie and last but not least - a big appendix with all what you need , very fine. Thank's for this good book.
congratulations July 2, 1998
1 out of 3 found this review helpful
Thankful we found more complete data on vacuum system.
Execellent, practical and comprehensive reference book. May 16, 1997
4 out of 4 found this review helpful
I borrowed this book from a colleague here at Applied Materials. After looking at it for a few minutes, I offered to buy it from him. Of course, he refused. So here I am at Amazon (physically at work) to purchase the book. It is extremely practical and I intend to keep it here at work as a reference for problems I encounter. By the way, my web address is http://www.netcom.com/~kvick/main.html. Please feel free to visit or email me
If you work with vacuum systems, DON'T LOAN THIS ONE! May 9, 1997
1 out of 1 found this review helpful
John f. O'Hanlon is so thorough, and has so much to offer. Whether the reader is an engineer or an operator of a vacuum system there is plenty here for each. This is a reference book, so never lend it to anyone!
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